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Introduction to Microlithography

Introduction to Microlithography

Hardback
Edition: 2nd ed
540 pages
Published: 1994
Publisher: American Chemical Society
ISBN / EAN: 0841228485

Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist mater



Other book areas

The Arts > Planographic Processes (Eg Lithography, Screen Printing, Stencilling)
The Arts > Art Techniques & Materials
Economics, Finance, Business And Industry > Production & Quality Control Management
Technology, Engineering, Agriculture, Veterinary Science > Industrial Chemistry & Manufacturing Technologies    
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